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arXiv · 2510.12234

Thermal scanning probe lithography for fabrication of perforated metallic films

Paloma E S Pellegrini·Francisco T Orlandini·Silvia V G Nista·Stéphane Lanteri·Hugo Enrique Hernández-Figueroa·Stanislav Moshkalev
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Abstract

Thermal scanning probe lithography offers high resolution and versatility, making it a promising alternative for fabricating photonic devices. Here, we introduce a new method that expands its applications by enabling direct fabrication of arbitrary perforated patterns on a silver film.

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Paloma E S Pellegrini, Francisco T Orlandini, Silvia V G Nista, Stéphane Lanteri, Hugo Enrique Hernández-Figueroa, Stanislav Moshkalev. 2025-10-14. Thermal scanning probe lithography for fabrication of perforated metallic films. https://arxiv.org/abs/2510.12234

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