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arXiv · 2406.01141

Improved Three-Dimensional Reconstructions in Electron Ptychography through Defocus Series Measurements

Marcel Schloz·Thomas C. Pekin·Hamish G. Brown·Dana O. Byrne·Bryan D. Esser·Emmanuel Terzoudis-Lumsden·Takashi Taniguchi·Kenji Watanabe·Scott D. Findlay·Benedikt Haas·Jim Ciston·Christoph T. Koch
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Abstract

A detailed analysis of ptychography for 3D phase reconstructions of thick specimens is performed. We introduce multi-focus ptychography, which incorporates a 4D-STEM defocus series to enhance the quality of 3D reconstructions along the beam direction through a higher overdetermination ratio. This method is compared with established multi-slice ptychography techniques, such as conventional ptychography, regularized ptychography, and multi-mode ptychography. Additionally, we contrast multi-focus ptychography with an alternative method that uses virtual optical sectioning through a reconstructed scattering matrix ($\mathcal{S}$-matrix), which offers more precise 3D structure information compared to conventional ptychography. Our findings from multiple 3D reconstructions based on simulated and experimental data demonstrate that multi-focus ptychography surpasses other techniques, particularly in accurately reconstructing the surfaces and interface regions of thick specimens.

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Marcel Schloz, Thomas C. Pekin, Hamish G. Brown, Dana O. Byrne, Bryan D. Esser, Emmanuel Terzoudis-Lumsden, Takashi Taniguchi, Kenji Watanabe, Scott D. Findlay, Benedikt Haas, Jim Ciston, Christoph T. Koch. 2024-06-03. Improved Three-Dimensional Reconstructions in Electron Ptychography through Defocus Series Measurements. https://arxiv.org/abs/2406.01141

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