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arXiv · 2305.14175

Site-Selective Enhancement of Superconducting Nanowire Single-Photon Detectors via Local Helium Ion Irradiation

Stefan Strohauer·Fabian Wietschorke·Lucio Zugliani·Rasmus Flaschmann·Christian Schmid·Stefanie Grotowski·Manuel Müller·Björn Jonas·Matthias Althammer·Rudolf Gross·Kai Müller·Jonathan J. Finley
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Abstract

Achieving homogeneous performance metrics between nominally identical pixels is challenging for the operation of arrays of superconducting nanowire single-photon detectors (SNSPDs). Here, we utilize local helium ion irradiation to post-process and tune single-photon detection efficiency, switching current, and critical temperature of individual devices on the same chip. For 12nm thick highly absorptive SNSPDs, which are barely single-photon sensitive prior to irradiation, we observe an increase of the system detection efficiency from $< 0.05\,\%$ to $(55.3 \pm 1.1)\,\%$ following irradiation. Moreover, the internal detection efficiency saturates at a temperature of 4.5 K after irradiation with $1800\, \mathrm{ions}\, \mathrm{nm}^{-2}$. For irradiated 10 nm thick detectors we observe a doubling of the switching current (to $20\, \mu\mathrm{A}$) compared to 8 nm SNSPDs of similar detection efficiency, increasing the amplitude of detection voltage pulses. Investigations of the scaling of superconducting thin film properties with irradiation up to a fluence of $2600\, \mathrm{ions}\, \mathrm{nm}^{-2}$ revealed an increase of sheet resistance and a decrease of critical temperature towards high fluences. A physical model accounting for defect generation and sputtering during helium ion irradiation is presented and shows good qualitative agreement with experiments.

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Stefan Strohauer, Fabian Wietschorke, Lucio Zugliani, Rasmus Flaschmann, Christian Schmid, Stefanie Grotowski, Manuel Müller, Björn Jonas, Matthias Althammer, Rudolf Gross, Kai Müller, Jonathan J. Finley. 2023-05-23. Site-Selective Enhancement of Superconducting Nanowire Single-Photon Detectors via Local Helium Ion Irradiation. https://doi.org/10.1002/qute.202300139

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