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arXiv · 2305.04337

Scalable photonic crystal waveguides with 2 dB component loss

Yahui Xiao·Feifan Wang·Dun Mao·Thomas Kananen·Tiantian Li·Hwaseob Lee·Zi Wang·Tingyi Gu
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Abstract

Periodic or gradient subwavelength structures are basic configurations of photonic crystals and metamaterials. The measured linear losses of those nanophotonic devices are well-beyond theoretical predictions. Nanofabrication related geometric inhomogeneity is considered as the primary cause of the deleterious performance. The deep-UV photolithography in CMOS foundry is a large-scale parallel processing, which can significantly suppress the random offsets and thus the optical linear loss. Here we demonstrate ultra-low loss photonic crystal waveguides with a multi-project wafer run through AIM photonics and post-processing. For sub-millimeter long photonic crystal waveguides, 2 dB total loss and 40 dB extinction ratio are observed across dies.

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Yahui Xiao, Feifan Wang, Dun Mao, Thomas Kananen, Tiantian Li, Hwaseob Lee, Zi Wang, Tingyi Gu. 2023-05-07. Scalable photonic crystal waveguides with 2 dB component loss. https://doi.org/10.1109/lpt.2022.3175157

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