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arXiv · 2302.14147

High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector

Wilhelm Eschen·Chang Liu·Daniel S. Penagos Molina·Robert Klas·Jens Limpert·Jan Rothhardt
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Abstract

We present high-speed and wide-field EUV ptychography at 13.5 nm wavelength using a table-top high-order harmonic source. By employing a scientific complementary metal oxide semiconductor (sCMOS) detector the scan time for sub-20 nm high-resolution measurements were significantly reduced by up to a factor of five. The fast frame rate of sCMOS enables wide-field imaging with a field of view of 100 {\mu}m x 100 {\mu}m with an imaging speed of 4.6 Mpix/h. Furthermore, fast EUV wavefront characterization is employed using a combination of the sCMOS detector with orthogonal probe relaxation.

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Wilhelm Eschen, Chang Liu, Daniel S. Penagos Molina, Robert Klas, Jens Limpert, Jan Rothhardt. 2023-01-26. High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector. https://doi.org/10.1364/oe.485779

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