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arXiv · 2208.12665

Scalably manufactured high-index atomic layer-polymer hybrid metasurfaces for high-efficiency virtual reality metaoptics in the visible

Joohoon Kim·Junhwa Seong·Wonjoong Kim·Gun-Yeal Lee·Hongyoon Kim·Seong-Won Moon·Jaehyuck Jang·Yeseul Kim·Younghwan Yang·Dong Kyo Oh·Chanwoong Park·Hojung Choi·Hyeongjin Jeon·Kyung-Il Lee·Byoungho Lee·Heon Lee·Junsuk Rho
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Abstract

Metalenses, which exhibit superior light-modulating performance with sub-micrometer-scale thicknesses, are suitable alternatives to conventional bulky refractive lenses. However, fabrication limitations, such as a high cost, low throughput, and small patterning area, hinder their mass production. Here, we demonstrate the mass production of low-cost, high-throughput, and large-aperture visible metalenses using an argon fluoride immersion scanner and wafer-scale nanoimprint lithography. Once a 12-inch master stamp is imprinted, hundreds of centimeter-scale metalenses can be fabricated. To enhance light confinement, the printed metasurface is thinly coated with a high-index film, resulting in drastic increase of conversion efficiency. As a proof of concept, a prototype of a virtual reality device with ultralow thickness is demonstrated with the fabricated metalens.

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Joohoon Kim, Junhwa Seong, Wonjoong Kim, Gun-Yeal Lee, Hongyoon Kim, Seong-Won Moon, Jaehyuck Jang, Yeseul Kim, Younghwan Yang, Dong Kyo Oh, Chanwoong Park, Hojung Choi, Hyeongjin Jeon, Kyung-Il Lee, Byoungho Lee, Heon Lee, Junsuk Rho. 2022-08-26. Scalably manufactured high-index atomic layer-polymer hybrid metasurfaces for high-efficiency virtual reality metaoptics in the visible. https://arxiv.org/abs/2208.12665

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