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arXiv · 2203.10921

Design and fabrication of ridge waveguide-based nanobeam cavities for on-chip single-photon sources

Uğur Meriç Gür·Yuhui Yang·Johannes Schall·Ronny Schmidt·Arsenty Kaganskiy·Yujing Wang·Luca Vannucci·Michael Mattes·Samel Arslanagić·Stephan Reitzenstein·Niels Gregersen
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Abstract

We report on the design of nanohole/nanobeam cavities in ridge waveguides for on-chip, quantum-dot-based single-photon generation. Our design overcomes limitations of a low-refractive-index-contrast material platform in terms of emitter-mode coupling efficiency and yields an outcoupling efficiency of 0.73 to the output ridge waveguide. Importantly, this high coupling efficiency is combined with broadband operation of 9 nm full-width half-maximum. We provide an explicit design procedure for identifying the optimum geometrical parameters according to the developed design. Besides, we fabricate and optically characterize a proof-of-concept waveguide structure. The results of the microphotoluminescence measurements provide evidence for cavity-enhanced spontaneous emission from the quantum dot, thus supporting the potential of our design for on-chip single-photon sources applications.

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Uğur Meriç Gür, Yuhui Yang, Johannes Schall, Ronny Schmidt, Arsenty Kaganskiy, Yujing Wang, Luca Vannucci, Michael Mattes, Samel Arslanagić, Stephan Reitzenstein, Niels Gregersen. 2022-03-21. Design and fabrication of ridge waveguide-based nanobeam cavities for on-chip single-photon sources. https://doi.org/10.1364/oe.453164

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