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arXiv · 2106.15724

Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane

Kazuhiro Kuruma·Afaq Habib Piracha·Dylan Renaud·Cleaven Chia·Neil Sinclair·Athavan Nadarajah·Alastair Stacey·Steven Prawer·Marko Lončar
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Abstract

We demonstrate two-dimensional photonic crystal cavities operating at telecommunication wavelengths in a single-crystal diamond membrane. We use a high-optical-quality and thin (~ 300 nm) diamond membrane, supported by a polycrystalline diamond frame, to realize fully suspended two-dimensional photonic crystal cavities with a high theoretical quality factor of ~ $8\times10^6$ and a relatively small mode volume of ~2$({\lambda}/n)^3$. The cavities are fabricated in the membrane using electron-beam lithography and vertical dry etching. We observe cavity resonances over a wide wavelength range spanning the telecommunication O- and S-bands (1360 nm-1470 nm) with Q factors of up to ~1800. Our method offers a new direction for on-chip diamond nanophotonic applications in the telecommunication-wavelength range.

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Kazuhiro Kuruma, Afaq Habib Piracha, Dylan Renaud, Cleaven Chia, Neil Sinclair, Athavan Nadarajah, Alastair Stacey, Steven Prawer, Marko Lončar. 2021-06-29. Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane. https://doi.org/10.1063/5.0061778

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