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arXiv · 2105.10611

Beam power scale-up in MEMS based multi-beam ion accelerators

Q. Ji·K. K. Afridi·T. Bauer·G. Giesbrecht·Y. Hou·A. Lal·D. Ni·A. Persaud·Z. Qin·P. Seidl·S. Sinha·T. Schenkel
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Abstract

We report on the development of multi-beam RF linear ion accelerators that are formed from stacks of low cost wafers and describe the status of beam power scale-up using an array of 120 beams. The total argon ion current extracted from the 120-beamlet extraction column was 0.5 mA. The measured energy gain in each RF gap reached as high as 7.25 keV. We present a path of using this technology to achieve ion currents >1 mA and ion energies >100 keV for applications in materials processing.

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Q. Ji, K. K. Afridi, T. Bauer, G. Giesbrecht, Y. Hou, A. Lal, D. Ni, A. Persaud, Z. Qin, P. Seidl, S. Sinha, T. Schenkel. 2021-05-22. Beam power scale-up in MEMS based multi-beam ion accelerators. https://doi.org/10.1063/5.0058175

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