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arXiv · 2011.02647

An Ultra-High-Vacuum Rotating Sample Manipulator with Cryogenic Cooling

X. Y. Tee·A. Paré·A. P. Petrović·C. Panagopoulos
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Abstract

We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for the electrical wiring to the sample holder for thermometry. The apparatus thus enables continuous sample rotation at regulated cryogenic temperatures in a UHV environment. We discuss the potential applications of this apparatus for cryogenic sputtering.

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X. Y. Tee, A. Paré, A. P. Petrović, C. Panagopoulos. 2020-11-05. An Ultra-High-Vacuum Rotating Sample Manipulator with Cryogenic Cooling. https://doi.org/10.1063/5.0021595

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