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arXiv · 2002.11447

Control of the Vertical Gradient Freeze crystal growth process via backstepping

Stefan Ecklebe·Frank Woittennek·Jan Winkler
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Abstract

This contribution presents a backstepping-based state feedback design for the tracking control of a two-phase Stefan problem which is encountered in the Vertical Gradient Freeze crystal growth process. A two-phase Stefan problem consists of two coupled free boundary problems and is a vital part of many crystal growth processes due to the time-varying extent of crystal and melt during growth. In addition, a different approach for the numerical approximation of the backstepping transformations kernel is presented.

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Stefan Ecklebe, Frank Woittennek, Jan Winkler. 2020-02-26. Control of the Vertical Gradient Freeze crystal growth process via backstepping. https://doi.org/10.1016/j.ifacol.2020.12.1537

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