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arXiv · 1907.08012

Manufacturable 300mm platform solution for Field-Free Switching SOT-MRAM

K. Garello·F. Yasin·H. Hody·S. Couet·L. Souriau·S. H. Sharifi·J. Swerts·R. Carpenter·S. Rao·W. Kim·J. Wu·K. K. V. Sethu·M. Pak·N. Jossart·D. Crotti·A. Furnémont·G. S. Kar
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Abstract

We propose a field-free switching SOT-MRAM concept that is integration friendly and allows for separate optimization of the field component and SOT/MTJ stack properties. We demonstrate it on a 300 mm wafer, using CMOS-compatible processes, and we show that device performances are similar to our standard SOT-MTJ cells: reliable sub-ns switching with low writing power across the 300mm wafer. Our concept/design opens a new area for MRAM (SOT, STT and VCMA) technology development.

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K. Garello, F. Yasin, H. Hody, S. Couet, L. Souriau, S. H. Sharifi, J. Swerts, R. Carpenter, S. Rao, W. Kim, J. Wu, K. K. V. Sethu, M. Pak, N. Jossart, D. Crotti, A. Furnémont, G. S. Kar. 2019-07-18. Manufacturable 300mm platform solution for Field-Free Switching SOT-MRAM. https://doi.org/10.23919/vlsit.2019.8776537

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