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arXiv · 1902.09418

X-ray optics and beam characterization using random modulation: Theory

Sebastien Berujon·Ruxandra Cojocaru·Pierre Piault·Rafael Celestre·Thomas Roth·Raymond Barrett·Eric Ziegler
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Abstract

X-ray near-field speckle-based phase-sensing approaches provide efficient means to characterise optical elements. Here, we present a theoretical review of several of these speckle methods in the frame of optical characterisation and provide a generalization of the concept. As we also demonstrate experimentally in another paper, the methods theoretically developed here can be applied with different beams and optics and within a variety of situations where at-wavelength metrology is desired. By understanding the differences between the various processing methods, it is possible to find and implement the best suited approach for each metrology scenario.

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Sebastien Berujon, Ruxandra Cojocaru, Pierre Piault, Rafael Celestre, Thomas Roth, Raymond Barrett, Eric Ziegler. 2019-02-25. X-ray optics and beam characterization using random modulation: Theory. https://doi.org/10.1107/s1600577520000491

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