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arXiv · 1812.06578

Development of novel one-shot full-field surface profilometer using chromatic confocal microscopy

Duc Trung Nguyen·Liang-Chia Chen
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Abstract

A novel full-field surface profilometer using diffractive-based chromatic confocal microscopy and area-scan spectral sensing is developed. A normalized cross correlation algorithm was developed to establish a spectrum-depth response curve. A measuring repeatability for a single surface depth can be controlled within 120 nanometers.

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Duc Trung Nguyen, Liang-Chia Chen. 2019-04-11. Development of novel one-shot full-field surface profilometer using chromatic confocal microscopy. https://arxiv.org/abs/1812.06578

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