Optimization of light trapping micro-hole structure for high-speed high-efficiency silicon photodiodes

Ekaterina Ponizovskaya Devine; Hilal Cansizoglu; Yang Gao; S. Ghandiparsi; Ahmet Kaya; Hasina H. Mamtaz; Ahmed S. Mayet; Toshishige Yamada; Aly F. Elrefaie; Shih-Yuan Wang; M. Saif Islam

doi:10.1109/ipcon.2017.8116236

arXiv · 1810.00943

Optimization of light trapping micro-hole structure for high-speed high-efficiency silicon photodiodes

Ekaterina Ponizovskaya Devine·Hilal Cansizoglu·Yang Gao·S. Ghandiparsi·Ahmet Kaya·Hasina H. Mamtaz·Ahmed S. Mayet·Toshishige Yamada·Aly F. Elrefaie·Shih-Yuan Wang·M. Saif Islam

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Abstract

We optimized micro-holes in a thin slab for fast Si photodetectors at wavelength 800-950nm. Lateral modes are shown to be responsible for the effective light trapping. Small disorder and cone hole shapes helped achieve uniform quantum efficiency in a wide wavelength range.

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Ekaterina Ponizovskaya Devine, Hilal Cansizoglu, Yang Gao, S. Ghandiparsi, Ahmet Kaya, Hasina H. Mamtaz, Ahmed S. Mayet, Toshishige Yamada, Aly F. Elrefaie, Shih-Yuan Wang, M. Saif Islam. 2018-08-29. Optimization of light trapping micro-hole structure for high-speed high-efficiency silicon photodiodes. https://doi.org/10.1109/ipcon.2017.8116236

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