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arXiv · 1809.03704

General Resolution Enhancement Method in Atomic Force Microscopy (AFM) Using Deep Learning

Y. Liu·Q. M. Sun·Dr. W. H. Lu·Dr. H. L. Wang·Y. Sun·Z. T. Wang·X. Lu·Prof. K. Y. Zeng
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Abstract

This paper develops a resolution enhancement method for post-processing the images from Atomic Force Microscopy (AFM). This method is based on deep learning neural networks in the AFM topography measurements. In this study, a very deep convolution neural network is developed to derive the high-resolution topography image from the low-resolution topography image. The AFM measured images from various materials are tested in this study. The derived high-resolution AFM images are comparable with the experimental measured high-resolution images measured at the same locations. The results suggest that this method can be developed as a general post-processing method for AFM image analysis.

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Y. Liu, Q. M. Sun, Dr. W. H. Lu, Dr. H. L. Wang, Y. Sun, Z. T. Wang, X. Lu, Prof. K. Y. Zeng. 2018-09-11. General Resolution Enhancement Method in Atomic Force Microscopy (AFM) Using Deep Learning. https://arxiv.org/abs/1809.03704

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