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arXiv · 1808.01392

X-ray imaging non-destructively identifies functional 3D photonic nanostructures

D. A. Grishina·C. A. M. Harteveld·A. Pacureanu·D. Devashish·A. Lagendijk·P. Cloetens·W. L. Vos
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Abstract

To investigate the performance of three-dimensional (3D) nanostructures, it is vital to study in situ their internal structure non-destructively. Hence, we perform synchrotron X-ray holographic tomography on exemplary 3D silicon photonic band gap crystals without irreversible preparation steps. Here, we obtain real space 3D density distributions of whole crystals buried on 2 mm^2 beams with 20 nanometer resolution. Our X-ray results identify why structures that look similar in scanning electron microscopy have vastly different nanophotonic functionality: One crystal with a broad photonic gap reveals 3D periodicity as designed ("Good"), a second structure without gap reveals a buried void ("Bad"), a third one without gap is shallow due to fabrication errors ("Ugly"). We conclude that X-ray tomography is a crucial tool to critically assess 3D functional nanostructures.

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D. A. Grishina, C. A. M. Harteveld, A. Pacureanu, D. Devashish, A. Lagendijk, P. Cloetens, W. L. Vos. 2018-08-03. X-ray imaging non-destructively identifies functional 3D photonic nanostructures. https://doi.org/10.1021/acsnano.9b05519

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