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arXiv · 1712.02032

TEM Nanosculpting of Topological Insulator Bi$_2$Se$_3$

Sarah Friedensen·William M. Parkin·Jerome T. Mlack·Marija Drndic
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Abstract

We present a process for sculpting Bi$_2$Se$_3$ nanoflakes into application-relevant geometries using a high resolution transmission electron microscope. This process takes several minutes to sculpt small areas and can be used to cut the Bi$_2$Se$_3$ into wires and rings, to thin areas of the Bi$_2$Se$_3$, and to drill circular holes and lines. We determined that this method allows for sub 10-nm features and results in clean edges along the drilled regions. Using in-situ high-resolution imaging, selected area diffraction, and atomic force microscopy, we found that this lithography process preserves the crystal structure of Bi$_2$Se$_3$. TEM sculpting is more precise and potentially results in cleaner edges than does ion-beam modification; therefore, the promise of this method for thermoelectric and topological devices calls for further study into the transport properties of such structures.

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Sarah Friedensen, William M. Parkin, Jerome T. Mlack, Marija Drndic. 2017-12-06. TEM Nanosculpting of Topological Insulator Bi$_2$Se$_3$. https://arxiv.org/abs/1712.02032

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