Dual-optical-comb spectroscopic ellipsometry

Takeo Minamikawa; Yi-Da Hsieh; Kyuki Shibuya; Eiji Hase; Yoshiki Kaneoka; Sho Okubo; Hajime Inaba; Yasuhiro Mizutani; Hirotsugu Yamamoto; Tetsuo Iwata; Takeshi Yasui

doi:10.1038/s41467-017-00709-y

arXiv · 1706.00002

Dual-optical-comb spectroscopic ellipsometry

Takeo Minamikawa·Yi-Da Hsieh·Kyuki Shibuya·Eiji Hase·Yoshiki Kaneoka·Sho Okubo·Hajime Inaba·Yasuhiro Mizutani·Hirotsugu Yamamoto·Tetsuo Iwata·Takeshi Yasui

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Abstract

Spectroscopic ellipsometry is a means to investigate optical and dielectric material responses. Conventional spectroscopic ellipsometry has trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance due to its sensitivity to mechanical vibrational noise, thermal instability, and polarization wavelength dependency. We equip a spectroscopic ellipsometer with dual-optical-comb spectroscopy, viz. dual-optical-comb spectroscopic ellipsometry (DCSE). The DCSE directly and simultaneously obtains amplitude and phase information with ultra-high spectral precision that is beyond the conventional limit. This precision is due to the automatic time-sweeping acquisition of the interferogram using Fourier transform spectroscopy and optical combs with well-defined frequency. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we evaluate the DCSE of birefringent materials and thin films, which showed improved spectral accuracy and a resolution of up to 1.2x10-5 nm across a 5-10 THz spectral bandwidth without any mechanical movement.

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Takeo Minamikawa, Yi-Da Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo Iwata, Takeshi Yasui. 2017-05-31. Dual-optical-comb spectroscopic ellipsometry. https://doi.org/10.1038/s41467-017-00709-y

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