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arXiv · 1610.09857

Buffer Layer Engineering on Graphene via Various Oxidation Methods for Atomic Layer Deposition

Nobuaki Takahashi·Kosuke Nagashio
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Abstract

The integration of high-k oxide on graphene using atomic layer deposition requires an electrically reliable buffer layer. In this study, Y was selected as the buffer layer due to the highest oxidation ability in rare earth elements and various oxidation methods (atmospheric, high-pressure O2 and ozone) were applied to the Y metal buffer layer. By optimizing oxidation conditions of the top gate insulator, we successfully improve the capacitance of top gate Y2O3 insulator and demonstrate a large Ion/Ioff ratio for bilayer graphene under an external electric field.

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Nobuaki Takahashi, Kosuke Nagashio. 2016-10-31. Buffer Layer Engineering on Graphene via Various Oxidation Methods for Atomic Layer Deposition. https://doi.org/10.7567/apex.9.125101

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