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arXiv · 1610.03722

Synthesis of Perovskite SrIrO3 Thin Films by Sputtering Technique

Z. Z. Li·O. Schneegans·L. Fruchter
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Abstract

We report on the synthesis of perovskite SrIrO3 thin films using sputtering technique. Single phase (110) oriented SrIrO$_3$ thin films were epitaxially grown on SrTiO3 (001) substrate. Using off-axis XRD $\theta-2\theta$ scans, we demonstrate that these films exhibit (110) out-of-plane orientation with (001) and (1-10) lying in-plane. The sputtering grown thin films have a smooth, homogeneous surface, and excellent coherent interface with the substrate.

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Z. Z. Li, O. Schneegans, L. Fruchter. 2016-10-12. Synthesis of Perovskite SrIrO3 Thin Films by Sputtering Technique. https://arxiv.org/abs/1610.03722

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