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arXiv · 1606.08870

Infrared vertically-illuminated photodiode for chip alignment feedback

Luca Alloatti·Rajeev Jagga Ram
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Abstract

We report on vertically-illuminated photodiodes fabricated in the GlobalFoundries 45nm 12SOI node and on a packaging concept for optically-interconnected chips. The photodiodes are responsive at 1180 nm, a wavelength currently used in chip-to-chip communications. They have further a wide field-of-view which enables chip-to-board positional feedback in chip-board assemblies. Monolithic integration enables on-chip processing of the positional data.

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Luca Alloatti, Rajeev Jagga Ram. 2016-06-27. Infrared vertically-illuminated photodiode for chip alignment feedback. https://doi.org/10.1063/1.4961949

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