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arXiv · 1604.02521

Focal shift of silicon microlens in mid-infrared regime

Haijie Zuo·Jiangyong Zhang·Leiying Ying·Baoping Zhang·Zhijin Hou·Hongxu Chen·Junjie Si
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Abstract

In this study, rigorous numerical calculation was utilized to characterize the focal properties of mid-infrared silicon microlens with the size about tens of micrometers. It is found that the focal shift phenomenon also exists in mid-infrared regime, which behaves differently from that of visual and near-infrared wavelength. Focal properties of silicon microlens were also measured experimentally, showing well coherence with simulation results. Our results provide systemic understanding of focal shift in mid-infrared regime, at that wavelength special consideration should be paid in micro-nano optics, especially with the integration between infrared optical system and other devices.

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Haijie Zuo, Jiangyong Zhang, Leiying Ying, Baoping Zhang, Zhijin Hou, Hongxu Chen, Junjie Si. 2016-04-09. Focal shift of silicon microlens in mid-infrared regime. https://doi.org/10.1186/s11671-015-1207-6

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