Ion microscopy based on laser-cooled cesium atoms

M. Viteau; M. Reveillard; L. Kime; B. Rasser; P. Sudraud; Y. Bruneau; G. Khalili; P. Pillet; D. Comparat; I. Guerri; A. Fioretti; D. Ciampini; M. Allegrini; F. Fuso

arXiv · 1601.01446

Ion microscopy based on laser-cooled cesium atoms

M. Viteau·M. Reveillard·L. Kime·B. Rasser·P. Sudraud·Y. Bruneau·G. Khalili·P. Pillet·D. Comparat·I. Guerri·A. Fioretti·D. Ciampini·M. Allegrini·F. Fuso

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Abstract

We demonstrate a prototype of a Focused Ion Beam machine based on the ionization of a laser-cooled cesium beam adapted for imaging and modifying different surfaces in the few-tens nanometer range. Efficient atomic ionization is obtained by laser promoting ground-state atoms into a target excited Rydberg state, then field-ionizing them in an electric field gradient. The method allows obtaining ion currents up to 130 pA. Comparison with the standard direct photo-ionization of the atomic beam shows, in our conditions, a 40-times larger ion yield. Preliminary imaging results at ion energies in the 1-5 keV range are obtained with a resolution around 40 nm, in the present version of the prototype. Our ion beam is expected to be extremely monochromatic, with an energy spread of the order of 1 eV, offering great prospects for lithography, imaging and surface analysis.

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M. Viteau, M. Reveillard, L. Kime, B. Rasser, P. Sudraud, Y. Bruneau, G. Khalili, P. Pillet, D. Comparat, I. Guerri, A. Fioretti, D. Ciampini, M. Allegrini, F. Fuso. 2016-01-07. Ion microscopy based on laser-cooled cesium atoms. https://arxiv.org/abs/1601.01446

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