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arXiv · 1402.2406

Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India

T. Aziz·S. R. Chendvankar·G. B. Mohanty·M. R. Patil·K. K. Rao·Y. R. Rani·Y. P. P. Rao·H. Behnamian·S. Mersi·M. Naseri
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Abstract

This paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor on a four-inch wafer. After finding suitable test procedures for characterizing these AC coupled sensors, we have fine-tuned various process parameters in order to produce sensors with the desired specifications.

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T. Aziz, S. R. Chendvankar, G. B. Mohanty, M. R. Patil, K. K. Rao, Y. R. Rani, Y. P. P. Rao, H. Behnamian, S. Mersi, M. Naseri. 2014-05-08. Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India. https://doi.org/10.1088/1748-0221%2F9%2F06%2Fp06008

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