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arXiv · 1306.5876

Electromechanical Piezoresistive Sensing in Suspended Graphene Membranes

A. D. Smith·F. Niklaus·A. Paussa·S. Vaziri·A. C. Fischer·M. Sterner·F. Forsberg·A. Delin·D. Esseni·P. Palestri·M. Östling·M. C. Lemme
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Abstract

Monolayer graphene exhibits exceptional electronic and mechanical properties, making it a very promising material for nanoelectromechanical (NEMS) devices. Here, we conclusively demonstrate the piezoresistive effect in graphene in a nano-electromechanical membrane configuration that provides direct electrical readout of pressure to strain transduction. This makes it highly relevant for an important class of nano-electromechanical system (NEMS) transducers. This demonstration is consistent with our simulations and previously reported gauge factors and simulation values. The membrane in our experiment acts as a strain gauge independent of crystallographic orientation and allows for aggressive size scalability. When compared with conventional pressure sensors, the sensors have orders of magnitude higher sensitivity per unit area.

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A. D. Smith, F. Niklaus, A. Paussa, S. Vaziri, A. C. Fischer, M. Sterner, F. Forsberg, A. Delin, D. Esseni, P. Palestri, M. Östling, M. C. Lemme. 2013-06-25. Electromechanical Piezoresistive Sensing in Suspended Graphene Membranes. https://doi.org/10.1021/nl401352k

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