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arXiv · 1111.4101

Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: robustness enhancement

Christyves Chevallier·Frédéric Genty·Joel Jacquet·Nicolas Fressengeas
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Abstract

A high reflectivity and polarization selective high contrast grating mirror has been designed with the use of an automated optimization algorithm. Through a precise study of the tolerance of the different lengths of the structure, the robustness with respect to the fabrication errors has been enhanced to high tolerance values between 5 % and 210 %. This adjustment of the dimensions of the structure leads to a 250 nm large bandwidth mirror well adapted for a VCSEL application at \lambda = 2.65 $\mu$m and can easily be scaled for other wavelengths.

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Christyves Chevallier, Frédéric Genty, Joel Jacquet, Nicolas Fressengeas. 2011-11-17. Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: robustness enhancement. https://doi.org/10.1016/j.optlastec.2011.09.010

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