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arXiv · 1111.1156

A stationary free boundary problem modeling electrostatic MEMS

Philippe Laurencot·Christoph Walker
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Abstract

A free boundary problem describing small deformations in a membrane based model of electrostatically actuated MEMS is investigated. The existence of stationary solutions is established for small voltage values. A justification of the widely studied narrow-gap model is given by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.

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Philippe Laurencot, Christoph Walker. 2011-11-04. A stationary free boundary problem modeling electrostatic MEMS. https://doi.org/10.1007/s00205-012-0559-7

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