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arXiv · 1110.3625

High-reflectivity, high-Q micromechanical membranes via guided resonances for enhanced optomechanical coupling

Catvu H. Bui·Jiangjun Zheng·S. W. Hoch·Lennon Y. T. Lee·J. G. E. Harris·Chee Wei Wong
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Abstract

Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high-Q SiNx membrane-type resonators used in membrane-in-the-middle optomechanical (OM) systems. Normal-incidence transmission and mechanical ringdown measurements of 50-nm-thick PhC membranes demonstrate GRs near 1064 nm, leading to a ~ 4\times increase in reflectivity while preserving high mechanical Q factors of up to ~ 5 \times 10^6. The results would allow improvement of membrane-in-the-middle OM systems by virtue of increased OM coupling, presenting a path towards ground state cooling of such a membrane and observations of related quantum effects.

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Catvu H. Bui, Jiangjun Zheng, S. W. Hoch, Lennon Y. T. Lee, J. G. E. Harris, Chee Wei Wong. 2011-10-17. High-reflectivity, high-Q micromechanical membranes via guided resonances for enhanced optomechanical coupling. https://doi.org/10.1063/1.3658731

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