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arXiv · 1106.0705

Selective tuning of high-Q silicon photonic crystal nanocavities via laser-assisted local oxidation

Charlton J. Chen·Jiangjun Zheng·Tingyi Gu·James F. McMillan·Mingbin Yu·Guo-Qiang Lo·Dim-Lee Kwong·Chee Wei Wong
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Abstract

We examine the cavity resonance tuning of high-Q silicon photonic crystal heterostructures by localized laser-assisted thermal oxidation using a 532 nm continuous wave laser focused to a 2.5 mm radius spot-size. The total shift is consistent with the parabolic rate law. A tuning range of up to 8.7 nm is achieved with ~ 30 mW laser powers. Over this tuning range, the cavity Q decreases from 3.2\times10^5 to 1.2\times10^5. Numerical simulations model the temperature distributions in the silicon photonic crystal membrane and the cavity resonance shift from oxidation.

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Charlton J. Chen, Jiangjun Zheng, Tingyi Gu, James F. McMillan, Mingbin Yu, Guo-Qiang Lo, Dim-Lee Kwong, Chee Wei Wong. 2011-06-03. Selective tuning of high-Q silicon photonic crystal nanocavities via laser-assisted local oxidation. https://doi.org/10.1364/oe.19.012480

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