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Tailoring strain in SrTiO3 compound by low energy He+ irradiation

S. Autier-Laurent·O. Plantevin·P. Lecoeur·B. Decamps·A. Gentils·C. Bachelet·O. Kaitasov·G. Baldinozzi
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Abstract

The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low energy He+ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from structural analysis. Due to clamping effect from the underlying layer, only perpendicular expansion is observed. Maximum distortions up to 5-7% are obtained with no evidence of amorphisation at fluences of 1E16 He+ ions/cm2 and ion energies in the range 10-30 keV.

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S. Autier-Laurent, O. Plantevin, P. Lecoeur, B. Decamps, A. Gentils, C. Bachelet, O. Kaitasov, G. Baldinozzi. 2010-10-29. Tailoring strain in SrTiO3 compound by low energy He+ irradiation. https://doi.org/10.1209/0295-5075%2F92%2F36005

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