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arXiv · 1009.5549

Near infra-red Mueller matrix imaging system and application to strain imaging

Lars Martin Sandvik Aas·Pål Gunnar Ellingsen·Morten Kildemo
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Abstract

We report on the design and performance of a near infra-red Mueller matrix imaging ellipsometer, and apply the instrument to strain imag- ing in near infra-red transparent solids. Particularly, we show that the instrument can be used to investigate complex strain domains in multi-crystalline silicon wafers.

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Lars Martin Sandvik Aas, Pål Gunnar Ellingsen, Morten Kildemo. 2010-09-28. Near infra-red Mueller matrix imaging system and application to strain imaging. https://doi.org/10.1016/j.tsf.2010.12.093

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