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arXiv · 1008.1483

Engineered arrays of NV color centers in diamond based on implantation of CN- molecules through nanoapertures

P. Spinicelli·A. Dréau·L. Rondin·F. Silva·J. Achard·S. Xavier·S. Bansropun·T. Debuisschert·S. Pezzagna·J. Meijer·V. Jacques·J. -F. Roch
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Abstract

We report a versatile method to engineer arrays of nitrogen-vacancy (NV) color centers in dia- mond at the nanoscale. The defects were produced in parallel by ion implantation through 80 nm diameter apertures patterned using electron beam lithography in a PMMA layer deposited on a diamond surface. The implantation was performed with CN- molecules which increased the NV defect formation yield. This method could enable the realization of a solid-state coupled-spin array and could be used for positioning an optically active NV center on a photonic microstructure.

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P. Spinicelli, A. Dréau, L. Rondin, F. Silva, J. Achard, S. Xavier, S. Bansropun, T. Debuisschert, S. Pezzagna, J. Meijer, V. Jacques, J. -F. Roch. 2010-08-09. Engineered arrays of NV color centers in diamond based on implantation of CN- molecules through nanoapertures. https://doi.org/10.1088/1367-2630/13/2/025014

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