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arXiv · 0909.0970

Cavity optomechanics with stoichiometric SiN films

D. J. Wilson·C. A. Regal·S. B. Papp·H. J. Kimble
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Abstract

We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factors and frequencies. Our SiN films support mechanical modes with unprecedented products of mechanical quality factor $Q_m$ and frequency $\nu_m$ reaching $Q_{m} \nu_m \simeq2 \times 10^{13}$ Hz. The SiN membranes exhibit a low optical absorption characterized by Im$(n) \lesssim 10^{-5}$ at 935 nm, representing a 15 times reduction for SiN membranes. We have developed an apparatus to simultaneously cool the motion of multiple mechanical modes based on a short, high-finesse Fabry-Perot cavity and present initial cooling results along with future possibilities.

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D. J. Wilson, C. A. Regal, S. B. Papp, H. J. Kimble. 2009-09-06. Cavity optomechanics with stoichiometric SiN films. https://doi.org/10.1103/physrevlett.103.207204

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