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arXiv · 0907.3809

Cluster Imaging with a Direct Detection CMOS Pixel Sensor in Transmission Electron Microscopy

Marco Battaglia·Devis Contarato·Peter Denes·Piero Giubilato
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Abstract

A cluster imaging technique for Transmission Electron Microscopy with a direct detection CMOS pixel sensor is presented. Charge centre-of-gravity reconstruction for individual electron clusters improves the spatial resolution and thus the point spread function. Data collected with a CMOS sensor with 9.5 micron pixels show an improvement of a factor of two in point spread function to 2.7 micron at 300 keV and of a factor of three in the image contrast, compared to traditional bright field illumination.

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Marco Battaglia, Devis Contarato, Peter Denes, Piero Giubilato. 2009-07-22. Cluster Imaging with a Direct Detection CMOS Pixel Sensor in Transmission Electron Microscopy. https://doi.org/10.1016/j.nima.2009.07.017

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