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arXiv · 0906.4234

Strain sensing with sub-micron sized Al-AlOx-Al tunnel junctions

P. J. Koppinen·J. T. Lievonen·M. Ahlskog·I. J. Maasilta
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Abstract

We demonstrate a local strain sensing method for nanostructures based on metallic Al tunnel junctions with AlOx barriers. The junctions were fabricated on top of a thin silicon nitride membrane, which was actuated with an AFM tip attached to a stiff cantilever. A large relative change in the tunneling resistance in response to the applied strain (gauge factor) was observed, up to a value 37. This facilitates local static strain variation measurements down to ~10^{-7}.

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P. J. Koppinen, J. T. Lievonen, M. Ahlskog, I. J. Maasilta. 2009-06-23. Strain sensing with sub-micron sized Al-AlOx-Al tunnel junctions. https://doi.org/10.1063/1.3298582

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