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arXiv · 0901.4158

High Quality factor photonic crystal nanobeam cavities

Parag B. Deotare·Murray W. McCutcheon·Ian W. Frank·Mughees Khan·Marko Loncar
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Abstract

We investigate the design, fabrication and experimental characterization of high Quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered 1D photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical Quality factors as high as 14 million. By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a Quality factor of nearly 750,000. The effect of cavity size on mode frequency and Quality factor was simulated and then verified experimentally.

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Parag B. Deotare, Murray W. McCutcheon, Ian W. Frank, Mughees Khan, Marko Loncar. 2009-02-05. High Quality factor photonic crystal nanobeam cavities. https://doi.org/10.1063/1.3107263

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