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arXiv · 0812.4025

Growth rate and EBSD texture analysis of nitrogen doped diamond films

T. Liu·D. Raabe
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Abstract

Chemical-Vapor-Deposition (CVD) diamond films were prepared using a variation of nitrogen addition into the gas source admixture by a direct current CVD method. The influence of nitrogen addition on the crystallographic texture and grain shape evolution in heteroepitaxial polycrystalline diamond films was investigated using high-resolution electron backscattering diffraction (HR-EBSD) and X-ray diffraction (XRD). The analysis reveals that an addition of 1.5% N2 to the CH4 gas flow leads to a strong enhancement of a {110} fiber texture. The phenomenon is discussed in terms of a competitive growth selection mechanism.

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T. Liu, D. Raabe. 2008-12-21. Growth rate and EBSD texture analysis of nitrogen doped diamond films. https://arxiv.org/abs/0812.4025

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