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arXiv · 0805.0932

Low Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System

Salim Touati·Nicolas Lorphelin·Alexandre Kanciurzewski·Renaud Robin·A. -S. Rollier·Olivier Millet·Karim Segueni
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Abstract

This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding anti-stiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF measurements are presented and preliminary experimental protocol and results of anti-stiction validation is detailed. Resulting RF performances are -30dB of isolation and -0.45dB of insertion loss at 10 GHz.

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Salim Touati, Nicolas Lorphelin, Alexandre Kanciurzewski, Renaud Robin, A. -S. Rollier, Olivier Millet, Karim Segueni. 2008-05-07. Low Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System. https://arxiv.org/abs/0805.0932

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