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arXiv · 0802.3088

A Reconfigurable Impedance Matching Network Employing RF-MEMS Switches

M. Bedani·F. Carozza·R. Gaddi·A. Gnudi·B. Margesin·F. Giacomozzi
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Abstract

We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS ohmic relays, metal-insulator-metal (MIM) capacitors and suspended spiral inductors, all integrated on a high resistivity Silicon substrate. The presented circuit is well-suited for all applications requiring adaptive impedance matching between two in principle unknown cascaded RF-circuits. The fabrication and testing of a monolithic integrated prototype in RF-MEMS technology from ITC-irst is currently underway.

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M. Bedani, F. Carozza, R. Gaddi, A. Gnudi, B. Margesin, F. Giacomozzi. 2008-02-21. A Reconfigurable Impedance Matching Network Employing RF-MEMS Switches. https://arxiv.org/abs/0802.3088

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