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arXiv · 0801.2515

Ion beam shaping and downsizing of nanostructures

M. Zgirski·K. P. Riikonen·V. Tuboltsev·P. Jalkanen·T. T. Hongisto·K. Yu Arutyunov
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Abstract

We report a new approach for progressive and well-controlled downsizing of nanostructures below the 10 nm scale. Low energetic ion beam (Ar+) is used for gentle surface erosion, progressively shrinking the dimensions with ~ 1 nm accuracy. The method enables shaping of nanostructure geometry and polishing the surface. The process is clean room / high vacuum compatible being suitable for various applications. Apart from technological advantages, the method enables study of various size phenomena on the same sample between sessions of ion beam treatment.

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M. Zgirski, K. P. Riikonen, V. Tuboltsev, P. Jalkanen, T. T. Hongisto, K. Yu Arutyunov. 2008-01-16. Ion beam shaping and downsizing of nanostructures. https://doi.org/10.1088/0957-4484/19/05/055301

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