Vibration Combined High Temperature Cycle Tests for Capacitive MEMS Accelerometers

Z. Szucs; G. Nagy; S. Hodossy; M. Rencz; A. Poppe

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arXiv · 0801.1030

Vibration Combined High Temperature Cycle Tests for Capacitive MEMS Accelerometers

Z. Szucs·G. Nagy·S. Hodossy·M. Rencz·A. Poppe

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Abstract

In this paper vibration combined high temperature cycle tests for packaged capacitive SOI-MEMS accelerometers are presented. The aim of these tests is to provide useful Design for Reliability information for MEMS designers. A high temperature test chamber and a chopper-stabilized read-out circuitry were designed and realized at BME - DED. Twenty thermal cycles of combined Temperature Cycle Test and Fatigue Vibration Test has been carried out on 5 samples. Statistical evaluation of the test results showed that degradation has started in 3 out of the 5 samples.

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Z. Szucs, G. Nagy, S. Hodossy, M. Rencz, A. Poppe. 2008-01-07. Vibration Combined High Temperature Cycle Tests for Capacitive MEMS Accelerometers. https://arxiv.org/abs/0801.1030

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