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arXiv · 0712.1623

Multidomain lithium niobate microcantilever for smart biosensor

Igor Ostrovskii·Andriy Nadtochiy·Keith Hollis
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Abstract

Fabrication of the bimorph lithium niobate cantilevers involves a micro machining of a z-cut wafer to create a multidomain structure. After etching, the bimorph ferroelectric cantilevers are fabricated at the locations near interdomain walls. Cantilever vibrations are excited by rf voltage due to piezoelectric effect in a ferroelectric chip, and optical detection is employed to pickup the vibrations. The self-assembling layers of two different Silanes are chemically deposited on the micro cantilevers. The layers are detected independently by two methods including a low frequency shift of cantilever natural vibrations, and Raman spectral lines from the Silane layers. Possible applications include smart biosensors in a real time domain.

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Igor Ostrovskii, Andriy Nadtochiy, Keith Hollis. 2007-12-11. Multidomain lithium niobate microcantilever for smart biosensor. https://arxiv.org/abs/0712.1623

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