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arXiv · 0706.2998

Conformal oxide coating of Carbon Nanotubes

S. Kawasaki·G. Catalan·H. Fan·M. M. Saad·J. M. Gregg·M. A. Correa-Duarte·J. Rybczynski·F. D. Morrison·T. Tatsuta·O. Tsuji·J. F. Scott
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Abstract

The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. We report the first integration of high-dielectric oxide films onto carbon nanotube electrodes with an aim of ultra-high integration density of FeRAMs (Tb/in2).

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S. Kawasaki, G. Catalan, H. Fan, M. M. Saad, J. M. Gregg, M. A. Correa-Duarte, J. Rybczynski, F. D. Morrison, T. Tatsuta, O. Tsuji, J. F. Scott. 2007-06-20. Conformal oxide coating of Carbon Nanotubes. https://doi.org/10.1063/1.2841710

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